Solaris 10 supports UFS filesystems up to 16TB (with files up to 1TB). To do this, the newfs command needs to be modified when creating the filesystem.
Creating a multiterabyte filesystem (assuming you have a disk array with that much storage on hand) can be done by adding the -T option to newfs as follows:
newfs -T /dev/rdsk/c0t1d0s1
The -T option forces the fragsize option to be equal to the logical block size (bsize). Fragsize determines the smallest chunk of disk space that can be used in a file and can usually be a power of two fraction of the block size, but it must be equal to the block size for big filesystems.
In addition, -T sets the number of bytes per inode (nbpi) to 1MB (1048576). When the filesystem is created, the total size of the filesystem is divided by nbpi to determine the number of inodes to create.